JPS63113999U - - Google Patents
Info
- Publication number
- JPS63113999U JPS63113999U JP646187U JP646187U JPS63113999U JP S63113999 U JPS63113999 U JP S63113999U JP 646187 U JP646187 U JP 646187U JP 646187 U JP646187 U JP 646187U JP S63113999 U JPS63113999 U JP S63113999U
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- movable part
- fixed
- shaft
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は、第１図に示す弾性部材とピエゾ素子の詳細
を示す斜視図、第３図は従来の一例を示す斜視図
である。
１……固定部、２……可動部、３ａ〜３ｄ……
薄肉可とう部、４……ピエゾ素子、５……弾性ピ
エゾホルダー。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view showing details of the elastic member and piezo element shown in FIG. 1, and FIG. 3 is a perspective view showing a conventional example. 1...Fixed part, 2...Movable part, 3a to 3d...
Thin flexible part, 4...piezo element, 5...elastic piezo holder.
Claims (1)
動部と、前記固定部と前記可動部と一体で形成さ
れ前記固定部と前記可動部の中間に位置して一つ
の軸を中心に放射状に配置した少なくとも３個以
上の薄肉可とう部と、前記固定部と前記可動部の
双方に両端を固定され前記軸の円周方向に伸縮で
きる弾性ピエゾホルダーと、前記軸の円周方向に
変位を発生する姿勢で前記弾性ピエゾホルダーに
よつて圧入保持されるピエゾ素子とを含むことを
特徴とする微動回転ステージ。 A plate-shaped fixed part, a plate-shaped movable part facing the fixed part, and formed integrally with the fixed part and the movable part, located between the fixed part and the movable part, and centered on one axis. at least three thin-walled flexible parts arranged radially on the shaft; an elastic piezo holder having both ends fixed to both the fixed part and the movable part and capable of expanding and contracting in the circumferential direction of the shaft; and a piezo element that is press-fitted and held by the elastic piezo holder in a posture that generates a displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP646187U JPS63113999U (en) | 1987-01-19 | 1987-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP646187U JPS63113999U (en) | 1987-01-19 | 1987-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63113999U true JPS63113999U (en) | 1988-07-22 |
Family
ID=30789004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP646187U Pending JPS63113999U (en) | 1987-01-19 | 1987-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63113999U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016080404A (en) * | 2014-10-10 | 2016-05-16 | 株式会社ジェイテック | High precision yawing driving device |
-
1987
- 1987-01-19 JP JP646187U patent/JPS63113999U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016080404A (en) * | 2014-10-10 | 2016-05-16 | 株式会社ジェイテック | High precision yawing driving device |