JPS6311380U - - Google Patents
Info
- Publication number
- JPS6311380U JPS6311380U JP10518786U JP10518786U JPS6311380U JP S6311380 U JPS6311380 U JP S6311380U JP 10518786 U JP10518786 U JP 10518786U JP 10518786 U JP10518786 U JP 10518786U JP S6311380 U JPS6311380 U JP S6311380U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- stocker
- opening
- main body
- stacking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000001105 regulatory effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10518786U JPS6311380U (tr) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10518786U JPS6311380U (tr) | 1986-07-09 | 1986-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311380U true JPS6311380U (tr) | 1988-01-25 |
Family
ID=30979379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10518786U Pending JPS6311380U (tr) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311380U (tr) |
-
1986
- 1986-07-09 JP JP10518786U patent/JPS6311380U/ja active Pending
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