JPS63112335U - - Google Patents

Info

Publication number

JPS63112335U

JPS63112335U JP242487U JP242487U JPS63112335U JP S63112335 U JPS63112335 U JP S63112335U JP 242487 U JP242487 U JP 242487U JP 242487 U JP242487 U JP 242487U JP S63112335 U JPS63112335 U JP S63112335U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

etched

light source

source means

infrared

Prior art date

1987-01-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 7
• 238000005530 etching Methods 0.000 claims 2
• 238000012544 monitoring process Methods 0.000 claims 1
• 230000003595 spectral effect Effects 0.000 claims 1
• 230000003287 optical effect Effects 0.000 description 1