JPS63111976U - - Google Patents

Info

Publication number
JPS63111976U
JPS63111976U JP250487U JP250487U JPS63111976U JP S63111976 U JPS63111976 U JP S63111976U JP 250487 U JP250487 U JP 250487U JP 250487 U JP250487 U JP 250487U JP S63111976 U JPS63111976 U JP S63111976U
Authority
JP
Japan
Prior art keywords
nozzle
movement
adhesive
adhesive application
reels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP250487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451903Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP250487U priority Critical patent/JPH0451903Y2/ja
Publication of JPS63111976U publication Critical patent/JPS63111976U/ja
Application granted granted Critical
Publication of JPH0451903Y2 publication Critical patent/JPH0451903Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP250487U 1987-01-12 1987-01-12 Expired JPH0451903Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP250487U JPH0451903Y2 (ko) 1987-01-12 1987-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP250487U JPH0451903Y2 (ko) 1987-01-12 1987-01-12

Publications (2)

Publication Number Publication Date
JPS63111976U true JPS63111976U (ko) 1988-07-19
JPH0451903Y2 JPH0451903Y2 (ko) 1992-12-07

Family

ID=30781403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP250487U Expired JPH0451903Y2 (ko) 1987-01-12 1987-01-12

Country Status (1)

Country Link
JP (1) JPH0451903Y2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370778U (ko) * 1989-11-15 1991-07-16
JP2011156498A (ja) * 2010-02-02 2011-08-18 Tokyo Electron Ltd スリットノズル及びスリットノズル清掃装置及びスリットノズル清掃方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370778U (ko) * 1989-11-15 1991-07-16
JP2011156498A (ja) * 2010-02-02 2011-08-18 Tokyo Electron Ltd スリットノズル及びスリットノズル清掃装置及びスリットノズル清掃方法

Also Published As

Publication number Publication date
JPH0451903Y2 (ko) 1992-12-07

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