JPS63111749U - - Google Patents
Info
- Publication number
- JPS63111749U JPS63111749U JP219487U JP219487U JPS63111749U JP S63111749 U JPS63111749 U JP S63111749U JP 219487 U JP219487 U JP 219487U JP 219487 U JP219487 U JP 219487U JP S63111749 U JPS63111749 U JP S63111749U
- Authority
- JP
- Japan
- Prior art keywords
- faraday
- corner
- control circuit
- exceeds
- operates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP219487U JPS63111749U (enExample) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP219487U JPS63111749U (enExample) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63111749U true JPS63111749U (enExample) | 1988-07-18 |
Family
ID=30780804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP219487U Pending JPS63111749U (enExample) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63111749U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358769A (en) * | 1976-11-08 | 1978-05-26 | Fujitsu Ltd | Ion injector |
-
1987
- 1987-01-09 JP JP219487U patent/JPS63111749U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358769A (en) * | 1976-11-08 | 1978-05-26 | Fujitsu Ltd | Ion injector |