JPS63111615U - - Google Patents
Info
- Publication number
- JPS63111615U JPS63111615U JP252487U JP252487U JPS63111615U JP S63111615 U JPS63111615 U JP S63111615U JP 252487 U JP252487 U JP 252487U JP 252487 U JP252487 U JP 252487U JP S63111615 U JPS63111615 U JP S63111615U
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- pressure
- fluid
- flow rate
- piezoresistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP252487U JPS63111615U (tr) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP252487U JPS63111615U (tr) | 1987-01-12 | 1987-01-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63111615U true JPS63111615U (tr) | 1988-07-18 |
Family
ID=30781443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP252487U Pending JPS63111615U (tr) | 1987-01-12 | 1987-01-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63111615U (tr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101192957B1 (ko) | 2010-08-23 | 2012-10-18 | 이성호 | 토르크 튜브 조립체를 적용한 패들식 질량 유량계 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643019B2 (tr) * | 1978-02-10 | 1981-10-08 |
-
1987
- 1987-01-12 JP JP252487U patent/JPS63111615U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643019B2 (tr) * | 1978-02-10 | 1981-10-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101192957B1 (ko) | 2010-08-23 | 2012-10-18 | 이성호 | 토르크 튜브 조립체를 적용한 패들식 질량 유량계 |