JPS63111291U - - Google Patents

Info

Publication number
JPS63111291U
JPS63111291U JP1987002534U JP253487U JPS63111291U JP S63111291 U JPS63111291 U JP S63111291U JP 1987002534 U JP1987002534 U JP 1987002534U JP 253487 U JP253487 U JP 253487U JP S63111291 U JPS63111291 U JP S63111291U
Authority
JP
Japan
Prior art keywords
vacuum
suction
type stage
groups
laser trimmer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987002534U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987002534U priority Critical patent/JPS63111291U/ja
Publication of JPS63111291U publication Critical patent/JPS63111291U/ja
Pending legal-status Critical Current

Links

JP1987002534U 1987-01-12 1987-01-12 Pending JPS63111291U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987002534U JPS63111291U (ko) 1987-01-12 1987-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987002534U JPS63111291U (ko) 1987-01-12 1987-01-12

Publications (1)

Publication Number Publication Date
JPS63111291U true JPS63111291U (ko) 1988-07-16

Family

ID=30781463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987002534U Pending JPS63111291U (ko) 1987-01-12 1987-01-12

Country Status (1)

Country Link
JP (1) JPS63111291U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008084642A1 (ja) * 2006-12-22 2008-07-17 Panasonic Corporation レーザ加工装置及びそれを用いたレーザ加工方法
WO2009001497A1 (ja) * 2007-06-28 2008-12-31 Panasonic Corporation レーザ加工装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008084642A1 (ja) * 2006-12-22 2008-07-17 Panasonic Corporation レーザ加工装置及びそれを用いたレーザ加工方法
WO2009001497A1 (ja) * 2007-06-28 2008-12-31 Panasonic Corporation レーザ加工装置

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