JPS63111291U - - Google Patents
Info
- Publication number
- JPS63111291U JPS63111291U JP1987002534U JP253487U JPS63111291U JP S63111291 U JPS63111291 U JP S63111291U JP 1987002534 U JP1987002534 U JP 1987002534U JP 253487 U JP253487 U JP 253487U JP S63111291 U JPS63111291 U JP S63111291U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- suction
- type stage
- groups
- laser trimmer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987002534U JPS63111291U (enExample) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987002534U JPS63111291U (enExample) | 1987-01-12 | 1987-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63111291U true JPS63111291U (enExample) | 1988-07-16 |
Family
ID=30781463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987002534U Pending JPS63111291U (enExample) | 1987-01-12 | 1987-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63111291U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008084642A1 (ja) * | 2006-12-22 | 2008-07-17 | Panasonic Corporation | レーザ加工装置及びそれを用いたレーザ加工方法 |
| WO2009001497A1 (ja) * | 2007-06-28 | 2008-12-31 | Panasonic Corporation | レーザ加工装置 |
-
1987
- 1987-01-12 JP JP1987002534U patent/JPS63111291U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008084642A1 (ja) * | 2006-12-22 | 2008-07-17 | Panasonic Corporation | レーザ加工装置及びそれを用いたレーザ加工方法 |
| WO2009001497A1 (ja) * | 2007-06-28 | 2008-12-31 | Panasonic Corporation | レーザ加工装置 |