JPS63111289U - - Google Patents

Info

Publication number
JPS63111289U
JPS63111289U JP388187U JP388187U JPS63111289U JP S63111289 U JPS63111289 U JP S63111289U JP 388187 U JP388187 U JP 388187U JP 388187 U JP388187 U JP 388187U JP S63111289 U JPS63111289 U JP S63111289U
Authority
JP
Japan
Prior art keywords
electrode
workpiece
lower electrode
holder
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP388187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP388187U priority Critical patent/JPS63111289U/ja
Publication of JPS63111289U publication Critical patent/JPS63111289U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP388187U 1987-01-14 1987-01-14 Pending JPS63111289U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP388187U JPS63111289U (zh) 1987-01-14 1987-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP388187U JPS63111289U (zh) 1987-01-14 1987-01-14

Publications (1)

Publication Number Publication Date
JPS63111289U true JPS63111289U (zh) 1988-07-16

Family

ID=30784048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP388187U Pending JPS63111289U (zh) 1987-01-14 1987-01-14

Country Status (1)

Country Link
JP (1) JPS63111289U (zh)

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