JPS63110867U - - Google Patents
Info
- Publication number
- JPS63110867U JPS63110867U JP123187U JP123187U JPS63110867U JP S63110867 U JPS63110867 U JP S63110867U JP 123187 U JP123187 U JP 123187U JP 123187 U JP123187 U JP 123187U JP S63110867 U JPS63110867 U JP S63110867U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- cooling device
- partition wall
- pressure gas
- gas cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP123187U JPS63110867U (ru) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP123187U JPS63110867U (ru) | 1987-01-08 | 1987-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110867U true JPS63110867U (ru) | 1988-07-16 |
Family
ID=30778948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP123187U Pending JPS63110867U (ru) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110867U (ru) |
-
1987
- 1987-01-08 JP JP123187U patent/JPS63110867U/ja active Pending
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