JPS63110563U - - Google Patents

Info

Publication number
JPS63110563U
JPS63110563U JP23187U JP23187U JPS63110563U JP S63110563 U JPS63110563 U JP S63110563U JP 23187 U JP23187 U JP 23187U JP 23187 U JP23187 U JP 23187U JP S63110563 U JPS63110563 U JP S63110563U
Authority
JP
Japan
Prior art keywords
electron beam
duct
control mechanism
electron
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP23187U priority Critical patent/JPS63110563U/ja
Publication of JPS63110563U publication Critical patent/JPS63110563U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP23187U 1987-01-07 1987-01-07 Pending JPS63110563U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23187U JPS63110563U (enrdf_load_html_response) 1987-01-07 1987-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23187U JPS63110563U (enrdf_load_html_response) 1987-01-07 1987-01-07

Publications (1)

Publication Number Publication Date
JPS63110563U true JPS63110563U (enrdf_load_html_response) 1988-07-15

Family

ID=30777015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23187U Pending JPS63110563U (enrdf_load_html_response) 1987-01-07 1987-01-07

Country Status (1)

Country Link
JP (1) JPS63110563U (enrdf_load_html_response)

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