JPS63110561U - - Google Patents

Info

Publication number
JPS63110561U
JPS63110561U JP20093486U JP20093486U JPS63110561U JP S63110561 U JPS63110561 U JP S63110561U JP 20093486 U JP20093486 U JP 20093486U JP 20093486 U JP20093486 U JP 20093486U JP S63110561 U JPS63110561 U JP S63110561U
Authority
JP
Japan
Prior art keywords
fixed structures
conductors
pillars
insulated
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20093486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20093486U priority Critical patent/JPS63110561U/ja
Publication of JPS63110561U publication Critical patent/JPS63110561U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20093486U 1986-12-29 1986-12-29 Pending JPS63110561U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20093486U JPS63110561U (enrdf_load_stackoverflow) 1986-12-29 1986-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20093486U JPS63110561U (enrdf_load_stackoverflow) 1986-12-29 1986-12-29

Publications (1)

Publication Number Publication Date
JPS63110561U true JPS63110561U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=31163915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20093486U Pending JPS63110561U (enrdf_load_stackoverflow) 1986-12-29 1986-12-29

Country Status (1)

Country Link
JP (1) JPS63110561U (enrdf_load_stackoverflow)

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