JPS63110558U - - Google Patents
Info
- Publication number
- JPS63110558U JPS63110558U JP206587U JP206587U JPS63110558U JP S63110558 U JPS63110558 U JP S63110558U JP 206587 U JP206587 U JP 206587U JP 206587 U JP206587 U JP 206587U JP S63110558 U JPS63110558 U JP S63110558U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- generated
- vacuum
- view
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP206587U JPS63110558U (OSRAM) | 1987-01-10 | 1987-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP206587U JPS63110558U (OSRAM) | 1987-01-10 | 1987-01-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110558U true JPS63110558U (OSRAM) | 1988-07-15 |
Family
ID=30780554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP206587U Pending JPS63110558U (OSRAM) | 1987-01-10 | 1987-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110558U (OSRAM) |
-
1987
- 1987-01-10 JP JP206587U patent/JPS63110558U/ja active Pending