JPS63110030U - - Google Patents
Info
- Publication number
- JPS63110030U JPS63110030U JP164987U JP164987U JPS63110030U JP S63110030 U JPS63110030 U JP S63110030U JP 164987 U JP164987 U JP 164987U JP 164987 U JP164987 U JP 164987U JP S63110030 U JPS63110030 U JP S63110030U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- filter
- semiconductor material
- casing body
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP164987U JPS63110030U (enExample) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP164987U JPS63110030U (enExample) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110030U true JPS63110030U (enExample) | 1988-07-15 |
Family
ID=30779757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP164987U Pending JPS63110030U (enExample) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110030U (enExample) |
-
1987
- 1987-01-09 JP JP164987U patent/JPS63110030U/ja active Pending