JPS63110029U - - Google Patents

Info

Publication number
JPS63110029U
JPS63110029U JP96987U JP96987U JPS63110029U JP S63110029 U JPS63110029 U JP S63110029U JP 96987 U JP96987 U JP 96987U JP 96987 U JP96987 U JP 96987U JP S63110029 U JPS63110029 U JP S63110029U
Authority
JP
Japan
Prior art keywords
alignment marker
linear
alignment
predetermined spacing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP96987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP96987U priority Critical patent/JPS63110029U/ja
Publication of JPS63110029U publication Critical patent/JPS63110029U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP96987U 1987-01-09 1987-01-09 Pending JPS63110029U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP96987U JPS63110029U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP96987U JPS63110029U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110029U true JPS63110029U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30778436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP96987U Pending JPS63110029U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110029U (enrdf_load_stackoverflow)

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