JPS63110028U - - Google Patents
Info
- Publication number
- JPS63110028U JPS63110028U JP1987001993U JP199387U JPS63110028U JP S63110028 U JPS63110028 U JP S63110028U JP 1987001993 U JP1987001993 U JP 1987001993U JP 199387 U JP199387 U JP 199387U JP S63110028 U JPS63110028 U JP S63110028U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- installation recess
- guide cavity
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987001993U JPS63110028U (enExample) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987001993U JPS63110028U (enExample) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110028U true JPS63110028U (enExample) | 1988-07-15 |
Family
ID=30780416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987001993U Pending JPS63110028U (enExample) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110028U (enExample) |
-
1987
- 1987-01-09 JP JP1987001993U patent/JPS63110028U/ja active Pending