JPS63110025U - - Google Patents

Info

Publication number
JPS63110025U
JPS63110025U JP166587U JP166587U JPS63110025U JP S63110025 U JPS63110025 U JP S63110025U JP 166587 U JP166587 U JP 166587U JP 166587 U JP166587 U JP 166587U JP S63110025 U JPS63110025 U JP S63110025U
Authority
JP
Japan
Prior art keywords
substrate
heat sink
chamber
holder
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP166587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP166587U priority Critical patent/JPS63110025U/ja
Publication of JPS63110025U publication Critical patent/JPS63110025U/ja
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP166587U 1987-01-08 1987-01-08 Pending JPS63110025U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP166587U JPS63110025U (US20090163788A1-20090625-C00002.png) 1987-01-08 1987-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP166587U JPS63110025U (US20090163788A1-20090625-C00002.png) 1987-01-08 1987-01-08

Publications (1)

Publication Number Publication Date
JPS63110025U true JPS63110025U (US20090163788A1-20090625-C00002.png) 1988-07-15

Family

ID=30779789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP166587U Pending JPS63110025U (US20090163788A1-20090625-C00002.png) 1987-01-08 1987-01-08

Country Status (1)

Country Link
JP (1) JPS63110025U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006095575A1 (ja) * 2005-03-07 2008-08-14 シャープ株式会社 プラズマ処理装置およびそれを用いた半導体薄膜の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006095575A1 (ja) * 2005-03-07 2008-08-14 シャープ株式会社 プラズマ処理装置およびそれを用いた半導体薄膜の製造方法

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