JPS63110024U - - Google Patents

Info

Publication number
JPS63110024U
JPS63110024U JP153487U JP153487U JPS63110024U JP S63110024 U JPS63110024 U JP S63110024U JP 153487 U JP153487 U JP 153487U JP 153487 U JP153487 U JP 153487U JP S63110024 U JPS63110024 U JP S63110024U
Authority
JP
Japan
Prior art keywords
substrate
support portion
substrate holder
annular protrusion
protrudes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP153487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP153487U priority Critical patent/JPS63110024U/ja
Publication of JPS63110024U publication Critical patent/JPS63110024U/ja
Pending legal-status Critical Current

Links

JP153487U 1987-01-09 1987-01-09 Pending JPS63110024U (US06229276-20010508-P00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP153487U JPS63110024U (US06229276-20010508-P00081.png) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP153487U JPS63110024U (US06229276-20010508-P00081.png) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110024U true JPS63110024U (US06229276-20010508-P00081.png) 1988-07-15

Family

ID=30779532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP153487U Pending JPS63110024U (US06229276-20010508-P00081.png) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110024U (US06229276-20010508-P00081.png)

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