JPS63108631U - - Google Patents
Info
- Publication number
- JPS63108631U JPS63108631U JP29787U JP29787U JPS63108631U JP S63108631 U JPS63108631 U JP S63108631U JP 29787 U JP29787 U JP 29787U JP 29787 U JP29787 U JP 29787U JP S63108631 U JPS63108631 U JP S63108631U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- heat treatment
- treatment apparatus
- cap
- vertical heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29787U JPS63108631U (OSRAM) | 1987-01-07 | 1987-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29787U JPS63108631U (OSRAM) | 1987-01-07 | 1987-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63108631U true JPS63108631U (OSRAM) | 1988-07-13 |
Family
ID=30777139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29787U Pending JPS63108631U (OSRAM) | 1987-01-07 | 1987-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63108631U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018020590A1 (ja) * | 2016-07-26 | 2018-02-01 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |
-
1987
- 1987-01-07 JP JP29787U patent/JPS63108631U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018020590A1 (ja) * | 2016-07-26 | 2018-02-01 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |