JPS63108629U - - Google Patents
Info
- Publication number
- JPS63108629U JPS63108629U JP29687U JP29687U JPS63108629U JP S63108629 U JPS63108629 U JP S63108629U JP 29687 U JP29687 U JP 29687U JP 29687 U JP29687 U JP 29687U JP S63108629 U JPS63108629 U JP S63108629U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion material
- bubbler
- liquid diffusion
- carrier gas
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 230000005587 bubbling Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29687U JPS63108629U (tr) | 1987-01-07 | 1987-01-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29687U JPS63108629U (tr) | 1987-01-07 | 1987-01-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63108629U true JPS63108629U (tr) | 1988-07-13 |
Family
ID=30777137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29687U Pending JPS63108629U (tr) | 1987-01-07 | 1987-01-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63108629U (tr) |
-
1987
- 1987-01-07 JP JP29687U patent/JPS63108629U/ja active Pending