JPS63107360U - - Google Patents
Info
- Publication number
- JPS63107360U JPS63107360U JP20101286U JP20101286U JPS63107360U JP S63107360 U JPS63107360 U JP S63107360U JP 20101286 U JP20101286 U JP 20101286U JP 20101286 U JP20101286 U JP 20101286U JP S63107360 U JPS63107360 U JP S63107360U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gripping
- guide rail
- guide
- guide pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000032258 transport Effects 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Discharge By Other Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20101286U JPS63107360U (es) | 1986-12-29 | 1986-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20101286U JPS63107360U (es) | 1986-12-29 | 1986-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63107360U true JPS63107360U (es) | 1988-07-11 |
Family
ID=31164067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20101286U Pending JPS63107360U (es) | 1986-12-29 | 1986-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63107360U (es) |
-
1986
- 1986-12-29 JP JP20101286U patent/JPS63107360U/ja active Pending
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