JPS63106764U - - Google Patents
Info
- Publication number
- JPS63106764U JPS63106764U JP1986199492U JP19949286U JPS63106764U JP S63106764 U JPS63106764 U JP S63106764U JP 1986199492 U JP1986199492 U JP 1986199492U JP 19949286 U JP19949286 U JP 19949286U JP S63106764 U JPS63106764 U JP S63106764U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- gas introduction
- introduction device
- nozzle
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986199492U JPS63106764U (enExample) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986199492U JPS63106764U (enExample) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106764U true JPS63106764U (enExample) | 1988-07-09 |
Family
ID=31161169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986199492U Pending JPS63106764U (enExample) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106764U (enExample) |
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1986
- 1986-12-26 JP JP1986199492U patent/JPS63106764U/ja active Pending