JPS63106764U - - Google Patents

Info

Publication number
JPS63106764U
JPS63106764U JP19949286U JP19949286U JPS63106764U JP S63106764 U JPS63106764 U JP S63106764U JP 19949286 U JP19949286 U JP 19949286U JP 19949286 U JP19949286 U JP 19949286U JP S63106764 U JPS63106764 U JP S63106764U
Authority
JP
Japan
Prior art keywords
reaction chamber
gas introduction
introduction device
nozzle
cap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19949286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19949286U priority Critical patent/JPS63106764U/ja
Publication of JPS63106764U publication Critical patent/JPS63106764U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19949286U 1986-12-26 1986-12-26 Pending JPS63106764U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19949286U JPS63106764U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19949286U JPS63106764U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Publications (1)

Publication Number Publication Date
JPS63106764U true JPS63106764U (enrdf_load_stackoverflow) 1988-07-09

Family

ID=31161169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19949286U Pending JPS63106764U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPS63106764U (enrdf_load_stackoverflow)

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