JPS63106756U - - Google Patents

Info

Publication number
JPS63106756U
JPS63106756U JP20317386U JP20317386U JPS63106756U JP S63106756 U JPS63106756 U JP S63106756U JP 20317386 U JP20317386 U JP 20317386U JP 20317386 U JP20317386 U JP 20317386U JP S63106756 U JPS63106756 U JP S63106756U
Authority
JP
Japan
Prior art keywords
furnace
heat treatment
gas
atmosphere gas
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20317386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217000Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20317386U priority Critical patent/JPH0217000Y2/ja
Publication of JPS63106756U publication Critical patent/JPS63106756U/ja
Application granted granted Critical
Publication of JPH0217000Y2 publication Critical patent/JPH0217000Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP20317386U 1986-12-26 1986-12-26 Expired JPH0217000Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20317386U JPH0217000Y2 (ko) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20317386U JPH0217000Y2 (ko) 1986-12-26 1986-12-26

Publications (2)

Publication Number Publication Date
JPS63106756U true JPS63106756U (ko) 1988-07-09
JPH0217000Y2 JPH0217000Y2 (ko) 1990-05-11

Family

ID=31168253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20317386U Expired JPH0217000Y2 (ko) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPH0217000Y2 (ko)

Also Published As

Publication number Publication date
JPH0217000Y2 (ko) 1990-05-11

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