JPS63106142U - - Google Patents
Info
- Publication number
- JPS63106142U JPS63106142U JP19948286U JP19948286U JPS63106142U JP S63106142 U JPS63106142 U JP S63106142U JP 19948286 U JP19948286 U JP 19948286U JP 19948286 U JP19948286 U JP 19948286U JP S63106142 U JPS63106142 U JP S63106142U
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- conversion mechanism
- wafers
- wafer
- pitch conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948286U JPS63106142U (enExample) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948286U JPS63106142U (enExample) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106142U true JPS63106142U (enExample) | 1988-07-08 |
Family
ID=31161148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19948286U Pending JPS63106142U (enExample) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106142U (enExample) |
-
1986
- 1986-12-26 JP JP19948286U patent/JPS63106142U/ja active Pending