JPS63106138U - - Google Patents
Info
- Publication number
- JPS63106138U JPS63106138U JP20177686U JP20177686U JPS63106138U JP S63106138 U JPS63106138 U JP S63106138U JP 20177686 U JP20177686 U JP 20177686U JP 20177686 U JP20177686 U JP 20177686U JP S63106138 U JPS63106138 U JP S63106138U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- inspecting
- brought
- test head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20177686U JPS63106138U (ko) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20177686U JPS63106138U (ko) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106138U true JPS63106138U (ko) | 1988-07-08 |
Family
ID=31165545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20177686U Pending JPS63106138U (ko) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106138U (ko) |
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1986
- 1986-12-26 JP JP20177686U patent/JPS63106138U/ja active Pending