JPS63106128U - - Google Patents
Info
- Publication number
- JPS63106128U JPS63106128U JP20281886U JP20281886U JPS63106128U JP S63106128 U JPS63106128 U JP S63106128U JP 20281886 U JP20281886 U JP 20281886U JP 20281886 U JP20281886 U JP 20281886U JP S63106128 U JPS63106128 U JP S63106128U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- arm
- holding
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 7
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20281886U JPS63106128U (xx) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20281886U JPS63106128U (xx) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106128U true JPS63106128U (xx) | 1988-07-08 |
Family
ID=31167558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20281886U Pending JPS63106128U (xx) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106128U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101365048B1 (ko) * | 2011-11-21 | 2014-02-21 | 주식회사 테라세미콘 | 보트 이송 시스템 |
-
1986
- 1986-12-26 JP JP20281886U patent/JPS63106128U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101365048B1 (ko) * | 2011-11-21 | 2014-02-21 | 주식회사 테라세미콘 | 보트 이송 시스템 |