JPS63106126U - - Google Patents

Info

Publication number
JPS63106126U
JPS63106126U JP19949186U JP19949186U JPS63106126U JP S63106126 U JPS63106126 U JP S63106126U JP 19949186 U JP19949186 U JP 19949186U JP 19949186 U JP19949186 U JP 19949186U JP S63106126 U JPS63106126 U JP S63106126U
Authority
JP
Japan
Prior art keywords
hawk
reaction tube
cylindrical portion
boat
larger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19949186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19949186U priority Critical patent/JPS63106126U/ja
Publication of JPS63106126U publication Critical patent/JPS63106126U/ja
Pending legal-status Critical Current

Links

JP19949186U 1986-12-26 1986-12-26 Pending JPS63106126U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19949186U JPS63106126U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19949186U JPS63106126U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Publications (1)

Publication Number Publication Date
JPS63106126U true JPS63106126U (enrdf_load_stackoverflow) 1988-07-08

Family

ID=31161167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19949186U Pending JPS63106126U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPS63106126U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101191598B1 (ko) 2010-10-20 2012-10-15 주식회사 지오스 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101191598B1 (ko) 2010-10-20 2012-10-15 주식회사 지오스 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부

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