JPS6310555U - - Google Patents

Info

Publication number
JPS6310555U
JPS6310555U JP10442186U JP10442186U JPS6310555U JP S6310555 U JPS6310555 U JP S6310555U JP 10442186 U JP10442186 U JP 10442186U JP 10442186 U JP10442186 U JP 10442186U JP S6310555 U JPS6310555 U JP S6310555U
Authority
JP
Japan
Prior art keywords
storage container
window
wafer
lid
wafer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10442186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10442186U priority Critical patent/JPS6310555U/ja
Publication of JPS6310555U publication Critical patent/JPS6310555U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10442186U 1986-07-08 1986-07-08 Pending JPS6310555U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10442186U JPS6310555U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10442186U JPS6310555U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6310555U true JPS6310555U (enrdf_load_stackoverflow) 1988-01-23

Family

ID=30977900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10442186U Pending JPS6310555U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6310555U (enrdf_load_stackoverflow)

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