JPS6310548U - - Google Patents

Info

Publication number
JPS6310548U
JPS6310548U JP10452086U JP10452086U JPS6310548U JP S6310548 U JPS6310548 U JP S6310548U JP 10452086 U JP10452086 U JP 10452086U JP 10452086 U JP10452086 U JP 10452086U JP S6310548 U JPS6310548 U JP S6310548U
Authority
JP
Japan
Prior art keywords
rollers
outer peripheral
utility
parallel
pressed against
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10452086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10452086U priority Critical patent/JPS6310548U/ja
Publication of JPS6310548U publication Critical patent/JPS6310548U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10452086U 1986-07-08 1986-07-08 Pending JPS6310548U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10452086U JPS6310548U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10452086U JPS6310548U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6310548U true JPS6310548U (enrdf_load_stackoverflow) 1988-01-23

Family

ID=30978091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10452086U Pending JPS6310548U (enrdf_load_stackoverflow) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6310548U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109657A (en) * 1976-03-11 1977-09-14 Noge Denki Kogyo Kk Drying apparatus
JPS60143634A (ja) * 1983-12-29 1985-07-29 Fujitsu Ltd ウエ−ハ処理方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109657A (en) * 1976-03-11 1977-09-14 Noge Denki Kogyo Kk Drying apparatus
JPS60143634A (ja) * 1983-12-29 1985-07-29 Fujitsu Ltd ウエ−ハ処理方法及び装置

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