JPS6310548U - - Google Patents
Info
- Publication number
- JPS6310548U JPS6310548U JP10452086U JP10452086U JPS6310548U JP S6310548 U JPS6310548 U JP S6310548U JP 10452086 U JP10452086 U JP 10452086U JP 10452086 U JP10452086 U JP 10452086U JP S6310548 U JPS6310548 U JP S6310548U
- Authority
- JP
- Japan
- Prior art keywords
- rollers
- outer peripheral
- utility
- parallel
- pressed against
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10452086U JPS6310548U (OSRAM) | 1986-07-08 | 1986-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10452086U JPS6310548U (OSRAM) | 1986-07-08 | 1986-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310548U true JPS6310548U (OSRAM) | 1988-01-23 |
Family
ID=30978091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10452086U Pending JPS6310548U (OSRAM) | 1986-07-08 | 1986-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310548U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109657A (en) * | 1976-03-11 | 1977-09-14 | Noge Denki Kogyo Kk | Drying apparatus |
| JPS60143634A (ja) * | 1983-12-29 | 1985-07-29 | Fujitsu Ltd | ウエ−ハ処理方法及び装置 |
-
1986
- 1986-07-08 JP JP10452086U patent/JPS6310548U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109657A (en) * | 1976-03-11 | 1977-09-14 | Noge Denki Kogyo Kk | Drying apparatus |
| JPS60143634A (ja) * | 1983-12-29 | 1985-07-29 | Fujitsu Ltd | ウエ−ハ処理方法及び装置 |