JPS6310547U - - Google Patents
Info
- Publication number
- JPS6310547U JPS6310547U JP10437786U JP10437786U JPS6310547U JP S6310547 U JPS6310547 U JP S6310547U JP 10437786 U JP10437786 U JP 10437786U JP 10437786 U JP10437786 U JP 10437786U JP S6310547 U JPS6310547 U JP S6310547U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- liquid
- outlet
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の一実施例を示し、ａは平面図
、ｂは断面図、第２図は従来の装置で、ａは平面
図、ｂは断面図である。 １……槽、２……吹出し口、３……液、４……
排液口、５……排液バルブ、６……撹拌子、７…
…撹拌装置。
、ｂは断面図、第２図は従来の装置で、ａは平面
図、ｂは断面図である。 １……槽、２……吹出し口、３……液、４……
排液口、５……排液バルブ、６……撹拌子、７…
…撹拌装置。
Claims (1)
- 洗浄槽において、槽内下部四角に液吹出し口を
有し、中央部下部に排液口を設けることを特徴と
する半導体洗浄装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10437786U JPS6310547U (ja) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10437786U JPS6310547U (ja) | 1986-07-07 | 1986-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310547U true JPS6310547U (ja) | 1988-01-23 |
Family
ID=30977817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10437786U Pending JPS6310547U (ja) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310547U (ja) |
-
1986
- 1986-07-07 JP JP10437786U patent/JPS6310547U/ja active Pending