JPS63105455A - Valiable slit device - Google Patents

Abstract

PURPOSE:To make it possible to smoothly and stably obtain fine adjustment by forming a pair of slit members into sliding plate members mutually inwardly and outwardly free-slidable and forming the respective openings into V-shaped recessed grooves which open mutually inwardly. CONSTITUTION:The respective apertures 5 of a pair of slit members 6 are formed into V-shaped recessed grooves which mutually inwardly open so that the slits 4 to be obtained by both apertures 5 may have an almost square space. Said space, even when both members 6 are made mutually inwardly or outwardly slided by a turn of a spiral lever 7, simply increases or decreases its diameter and its shape is kept almost square. Accordingly, the shape of an ion beam, which is guided to the members 6 from their front, is only increased or decreased in its diameter in the range, for instance, of 1-2mm, meanwhile its sectional shape is kept always almost square. Thereby, when the ion beam is guided, for instance, to a mass analyzer for adjusting its resolution, its adjustment can be smoothly and surely performed.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a variable slit device mainly applied to the path of an ion beam guided to a T1m analyzer.

(Prior Art) Conventionally, in this type of device, a pair of front and rear slit members having respective openings to form slits interposed in the passage are arranged in parallel within a frame having a beam passage for guiding the ion beam. A type is known in which the degree of opening of the slit is adjusted by mutual sliding of both members.

(Problem to be Solved by the Invention) However, in this case, both members are composed of a pair of coaxial cylindrical bodies, and each opening is a circular through-hole formed therein. In such cases,
When the opening degree of the slit consisting of both feed holes is adjusted, not only the diameter of the beam changes, but also the shape of the slit changes, which is undesirable.

(Means for solving the problem) The purpose of the Najizuki Honseng proposal is to obtain an apparatus that does not have such inconveniences, that is, an apparatus that can adjust the beam diameter without changing the beam shape. A pair of front and rear slits each having an opening to form a slit interposed in the passage are arranged in parallel in a frame cylinder having a beam passage for guiding the beam, so that mutual sliding of both members is possible. According to the motion, in a device in which the opening degree of the slit can be adjusted, when the two members are rotated by a screw rod, they are guided by the right-hand thread and the left-hand thread of the two halves, and are moved inside and outside each other. The openings are formed as V-shaped grooves that open inwardly on each member.

(Function) To explain the function, each opening of the pair of slit members is formed into a 7-shaped groove that opens inwardly, and thus the slit obtained by both openings is approximately rectangular. When both members are then slid inwardly or outwardly relative to each other by the rotation of the screw rod, the diameter of this space is simply increased or decreased, and its shape remains approximately the same. It remains square; in other words, it maintains its shape.

Thus, the ion beam guided from the front of this
To smoothly and reliably obtain the adjustment when the diameter is increased or decreased only in the range of 1 to 2 seconds, so that the cross-sectional shape always remains approximately rectangular, and when the resolution is adjusted by guiding it to a mass spectrometer, for example. I can do it.

(Example) An example of implementing the present invention will be explained with reference to the attached drawings.

In the drawing, (1) shows a frame cylinder having a beam path a for guiding the ion beam, and the frame cylinder (1) has an inlet (2) for the beam at one end and an outlet (3) for the beam at the other end. and each slit member (6) having each opening (5) in which a slit (4) to be inserted into the beam path a is to be formed is arranged side by side in a pair of front and rear, and both members ( 6) (6
), both openings (5) (5) were deviated to H, so that the degree of opening of the slit (4) could be adjusted. It is assumed that the inside of the frame cylinder (1) is evacuated and exists in a suitable vacuum atmosphere.

Although the above is not particularly different from the conventional one, according to the present invention,
Both members (6) <6) are guided into the right-hand thread and the left-hand thread of the two halves (7a) (7a) according to the rotation of the screw rod (D) installed horizontally in the frame tube (1). The openings (5) (5) are formed into V-shaped grooves that open inwardly.

In the illustrated example, the screw rod (7) is connected to both members <6) (6
), and both members (G) (6) are screwed into each arm (6a) (6a) extending above the member (G) (6), and the threaded rod (7) has a rotation introduction part at its end. (8) to be connected to an external motor or other driving body (9), and further inside the frame cylinder (1) both members (
6) A guide iron (IQ) is installed horizontally on the lower side of (6), and both members ((3) and (6) are slidably attached to each arm (6b) (6b) extending downward. It was made to be engaged.

Furthermore, in the illustrated one, on the front of both members (6) (6),
Electrode plates (13) that produce a corresponding electrical output when irradiated with an ion beam are arranged on four plates (top, bottom, left and right), and are connected to each electrode terminal surface on the side through each conductive wire (In). When the beam deviates with respect to the slit, it is possible to detect this, and if necessary, a correction means (not shown) can be used in response to this, so that the beam can always be directed onto the slit. .

(Effects of the Invention) According to the present invention, the pair of slit members are configured as sliding plate members that can freely slide inwardly and outwardly, and each opening is formed into a V-shaped recess that opens inwardly. It is formed in a groove, and the slit obtained by both openings is a substantially rectangular space, and the diameter of this space is simply increased or decreased by mutual sliding of both members, so that the slit is always substantially rectangular. Therefore, ion beams and other beams guided from the front always have a generally rectangular cross section behind them, making them easier to control than those whose shape changes. Furthermore, the mutual forward movement of both members is respected by the right-hand thread and left-hand thread of both halves of the screw rod, which has the effect of allowing fine adjustments to be made smoothly and stably. .

[Brief explanation of the drawing]

Fig. 1 is a partially cutaway front view of an example of the device of the present invention, Fig. 2 is a sectional view taken along the line f--I, and Fig. 3 is a front view of the main parts to explain its operation. . (1)...Frame cylinder a...Beam passage (4
)...Slit (5) (5)...Opening (6
) (6)...Slit member (7)...Screw rod (
7a) (7a)...Both halves

Claims (1)

[Claims] A pair of front and rear slit members having respective openings to form slits interposed in the passages are arranged in parallel in a frame housing having a beam passage for guiding ion beams or other beams, so that mutual sliding of the two members is prevented. According to the above, in a device in which the opening degree of the slit can be adjusted, when the two members are rotated by the screw rod, they are guided by the right-hand thread and the left-hand thread of the two halves, and slide in and out of each other. A variable slit device comprising a sliding plate member that is moved, and each opening is formed as a V-shaped groove that opens inwardly on each member.