JPS63105328U - - Google Patents

Info

Publication number
JPS63105328U
JPS63105328U JP19822786U JP19822786U JPS63105328U JP S63105328 U JPS63105328 U JP S63105328U JP 19822786 U JP19822786 U JP 19822786U JP 19822786 U JP19822786 U JP 19822786U JP S63105328 U JPS63105328 U JP S63105328U
Authority
JP
Japan
Prior art keywords
mounting
hole
vacuum vessel
mounting structure
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19822786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19822786U priority Critical patent/JPS63105328U/ja
Publication of JPS63105328U publication Critical patent/JPS63105328U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP19822786U 1986-12-25 1986-12-25 Pending JPS63105328U (US20030157376A1-20030821-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19822786U JPS63105328U (US20030157376A1-20030821-M00001.png) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19822786U JPS63105328U (US20030157376A1-20030821-M00001.png) 1986-12-25 1986-12-25

Publications (1)

Publication Number Publication Date
JPS63105328U true JPS63105328U (US20030157376A1-20030821-M00001.png) 1988-07-08

Family

ID=31158718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19822786U Pending JPS63105328U (US20030157376A1-20030821-M00001.png) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPS63105328U (US20030157376A1-20030821-M00001.png)

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