JPS63105063U - - Google Patents

Info

Publication number

JPS63105063U

JPS63105063U JP20397586U JP20397586U JPS63105063U JP S63105063 U JPS63105063 U JP S63105063U JP 20397586 U JP20397586 U JP 20397586U JP 20397586 U JP20397586 U JP 20397586U JP S63105063 U JPS63105063 U JP S63105063U

Authority

JP

Japan

Prior art keywords

defect

signal

outputs

trigger

photographing

Prior art date

1986-12-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000007547 defect Effects 0.000 claims description 14
• 238000001514 detection method Methods 0.000 claims description 3
• 239000000428 dust Substances 0.000 claims 1
• 238000007689 inspection Methods 0.000 claims 1
• 230000003287 optical effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3