JPS63104925U - - Google Patents
Info
- Publication number
- JPS63104925U JPS63104925U JP20194586U JP20194586U JPS63104925U JP S63104925 U JPS63104925 U JP S63104925U JP 20194586 U JP20194586 U JP 20194586U JP 20194586 U JP20194586 U JP 20194586U JP S63104925 U JPS63104925 U JP S63104925U
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- jet
- air shower
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20194586U JPS63104925U (sl) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20194586U JPS63104925U (sl) | 1986-12-25 | 1986-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63104925U true JPS63104925U (sl) | 1988-07-07 |
Family
ID=31165875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20194586U Pending JPS63104925U (sl) | 1986-12-25 | 1986-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63104925U (sl) |
-
1986
- 1986-12-25 JP JP20194586U patent/JPS63104925U/ja active Pending