JPS63104220A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS63104220A JPS63104220A JP24987486A JP24987486A JPS63104220A JP S63104220 A JPS63104220 A JP S63104220A JP 24987486 A JP24987486 A JP 24987486A JP 24987486 A JP24987486 A JP 24987486A JP S63104220 A JPS63104220 A JP S63104220A
- Authority
- JP
- Japan
- Prior art keywords
- gaseous flow
- thin film
- vapor
- coiled
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000007740 vapor deposition Methods 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000001590 oxidative effect Effects 0.000 claims abstract description 4
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims abstract description 3
- 239000010408 film Substances 0.000 abstract description 5
- 238000004804 winding Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 11
- 230000004907 flux Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体の製造方法に関し、さらに詳しく
は耐候特性、保存安定性に優れた金属薄膜型磁気記録媒
体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a magnetic recording medium, and more particularly to a method for manufacturing a metal thin film type magnetic recording medium having excellent weather resistance and storage stability.
磁気記録媒体としては従来、非磁性基体上に粉末磁性材
料を有機バインダー等と共に塗布乾燥せしめたいわゆる
「塗布型」磁気記録媒体が広く使用されてきた。しかる
に近年の高密度磁気記録への要求に対しては大きな電相
磁束を有するいわゆる「金属薄膜型」磁気記録媒体によ
る対応がなされており、Co、Fe、Ni等を材料とす
る斜め蒸着法を利用した蒸着テープ、Co−Cr合金の
スパッタリングあるいは蒸着法を利用した垂直磁化型テ
ープ、ディスク等の研究開発が行なわれている。As magnetic recording media, so-called "coating type" magnetic recording media, in which a powdered magnetic material is coated on a non-magnetic substrate together with an organic binder and dried, have been widely used. However, in recent years, the demand for high-density magnetic recording has been met by so-called "metal thin film" magnetic recording media that have a large electrophase magnetic flux. Research and development is being carried out on perpendicular magnetization tapes, disks, etc. using vapor-deposited tapes, sputtering or vapor deposition of Co--Cr alloys.
しかしながら、一般にこういった磁性金属薄膜は耐候性
において劣る。例えば、高温高温条件下に放置すると総
磁束量が104以上も減少してしまう、といつ九現象が
ある。1紙結露−乾燥のプロセスのくり返しにより目視
で判るほどの錆が発生するといった問題もある。これら
の磁束量の減少、錆の発生1!−まとめて耐候性と称し
ている。However, such magnetic metal thin films generally have poor weather resistance. For example, there is a phenomenon in which the total amount of magnetic flux decreases by 104 or more when left under high temperature conditions. There is also the problem that rust that is visible to the naked eye occurs due to the repeated process of dew condensation and drying on paper. Decrease in the amount of magnetic flux and occurrence of rust 1! - Collectively referred to as weather resistance.
この金属薄膜型磁気記録媒体の耐候性を改良する手段は
種々提案されているが、その多くは効果が充分とは云え
ない。・あるいは大規模な装置を要し生産性に乏しい等
の問題を有しており、より簡便で効果の大きい耐候性の
改良が望まれていた。Various means have been proposed for improving the weather resistance of this metal thin film type magnetic recording medium, but most of them cannot be said to be sufficiently effective. -Also, there are problems such as requiring large-scale equipment and poor productivity, and there has been a desire for a simpler and more effective improvement in weather resistance.
本発明は以上の事情に鑑みなされたもので、耐候特性、
保存安定性の改良された金属薄膜型磁気記録媒体の製造
方法を提供するものである。The present invention was made in view of the above circumstances, and includes weather resistance,
The present invention provides a method for manufacturing a metal thin film magnetic recording medium with improved storage stability.
本発明は、可とう性基体上に巻取蒸着法により磁性金属
、合金薄膜を設けた巻取蒸着品を、その巻かれた間の空
隙に酸化性ガスを含む気流を生ぜしめた条件で保存する
ことを特徴とする磁気記録媒体の製造方法、に関する。The present invention is a method of storing a rolled-evaporated product in which a thin film of magnetic metal or alloy is provided on a flexible substrate by a winding-evaporation method under conditions that generate an air flow containing an oxidizing gas in the gap between the wound parts. The present invention relates to a method of manufacturing a magnetic recording medium, characterized in that:
本発明の可とう性基体は、主としてポリエチレンテレフ
タレート、ポリイミド、ポリアミド、ポリ塩化ビニル、
三酢酸セルロース、ポリカボネー、ト、ポリエチレンナ
フタレート等のプラスチック製基体である。The flexible substrate of the present invention is mainly made of polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride,
The substrate is made of plastic such as cellulose triacetate, polycarbonate, polyethylene naphthalate, etc.
巻取蒸着装置の一例を第1図に示す。これは−室構成の
蒸着装置であり可とう性基体7は送り出しロールtより
送り出され冷却ドラムタに沿って移動し巻き取りロール
/!に巻き取られる。下室lが蒸着室であって、ルツボ
ioよりの蒸気流が基体上に堆積し、磁性薄膜を形成す
る。第1図に示したのはいわゆる斜め蒸着により磁性膜
を形成する手法であり、マスク/、?により入射蒸気流
の一部全規制している。また、ガス導入口//、/コ等
から酸化性ガス等を導入して磁気特性をコントロールす
る等の手法を用いることも可能である。An example of a winding vapor deposition apparatus is shown in FIG. This is a vapor deposition apparatus having a -chamber configuration, in which the flexible substrate 7 is sent out from a delivery roll t, moves along a cooling drum, and is taken up by a take-up roll/! It is wound up. The lower chamber 1 is a deposition chamber, and the vapor flow from the crucible IO is deposited on the substrate to form a magnetic thin film. What is shown in FIG. 1 is a method of forming a magnetic film by so-called oblique deposition, using a mask/? The incident steam flow is partly and completely regulated. It is also possible to use a method such as controlling the magnetic properties by introducing an oxidizing gas or the like through the gas inlets //, /, etc.
第1図に示したのは、半連続式の巻取蒸着装置であって
、送り出しロール互より供給される基体上への薄膜形成
が終了すればその基体長に応じて巻取ロールl!に蒸着
品が得られることとなる。What is shown in FIG. 1 is a semi-continuous type take-up vapor deposition apparatus, in which when the thin film has been formed on the substrate fed from the feed rolls, the take-up roll l is adjusted according to the length of the substrate. A vapor-deposited product can be obtained.
本発明の巻取蒸着品の巻かれi間の空隙に気流音生せし
める一手段ヲ第2図に基づいて説明する。One means for producing airflow sound in the gaps between the windings i of the rolled vapor-deposited product of the present invention will be explained with reference to FIG.
甘ず第2図(A)に示したのは巻取蒸着品であって、典
型的には中空巻芯/乙の回りに薄膜を形成された基体1
7が巻かれた状態になっている。第1図(B)では巻か
れた間の空隙コ/に気流?生ぜしめるための一手段金模
式的に示しているが、気密シールム!で巻取蒸着品をシ
ールした状態で真空ボンプコ0により真空に引くことに
より空隙J/に気流を生ぜしめている。一般に特にプラ
スチック基体上に金属薄膜を設けた場合、また特に基体
が薄い場合には巻取り蒸着品での巻かれた間の空隙2/
はきわめてせまく、第2図のよって何らか作為的に気流
を起こさせる必要がある。ここで第一図(B)で雰囲気
を空気とすることも良く、また、より本発明の効果を上
げるべくより酸素濃度を高めたガスとすることも良く、
更にはオゾン等のより反応性の高いガスを使用すること
もできる。更Kまた、薄膜材料と気流成分ガスの組合せ
によシ特性をコントロールすることは可能であり、NH
3ガス、NO2ガス、H2Sガス等々も使用できる。す
なわち、本発明は、巻取蒸着完了直后の未だ活性な金属
薄膜を反応せしめ、より安定な薄膜とするため簡便なる
手段とめえる。上記気流にさらす時間はフィルム巾等に
より異なるが72時間以上が好ましい。What is shown in Figure 2 (A) is a rolled vapor-deposited product, typically a substrate 1 on which a thin film is formed around a hollow core/B.
7 is rolled up. In Figure 1 (B), is there airflow in the air gap between the coils? One way to create gold is shown schematically, but it is an airtight seal! An air current is generated in the gap J/ by evacuating the rolled vapor-deposited product with a vacuum pump 0 while sealing it. In general, especially when a metal thin film is provided on a plastic substrate, and especially when the substrate is thin, the air gap 2/
The space is extremely narrow, and as shown in Figure 2, it is necessary to create some kind of airflow. Here, in FIG. 1 (B), the atmosphere may be air, or it may be a gas with a higher oxygen concentration to further increase the effect of the present invention.
Furthermore, more reactive gases such as ozone can also be used. Furthermore, it is possible to control the characteristics by combining the thin film material and the gas component of the airflow, and it is possible to
3 gas, NO2 gas, H2S gas, etc. can also be used. That is, the present invention can be considered as a simple means for reacting the still active metal thin film immediately after the completion of the winding vapor deposition to form a more stable thin film. The time for exposure to the air current varies depending on the film width, etc., but is preferably 72 hours or more.
以下実施例に基づき更に説明する。Further explanation will be given below based on examples.
第7図に示した蒸7i1!置を使用し、り、!μm厚の
ポリエチレンテレフタレート基体上に斜め蒸着法により
Co soN i 20 (atom%)蒸着磁性薄膜
を形成した。フィルム幅は300關であり、銀zooo
mの基体を使用した。搬送スピードは30m7分、入射
角θml、 =J j ’、薄厚コoo。Steam 7i1 shown in Figure 7! Use the location! A magnetic thin film of CosoN i 20 (atom %) was deposited on a μm-thick polyethylene terephthalate substrate by an oblique deposition method. The film width is 300 mm, and the silver zoooo
A substrate of m was used. Conveyance speed is 30m7 minutes, incident angle θml, = J j ', thin thickness oo.
Aとし、かつ//、lコよシ02ガスを蒸着空3内真空
度が3.0×10 ’ Torrとなる様等量導入し
つつ蒸着を行なった。この同じ条件でコ本の巻取蒸着品
を得た。このうちの7本は常温常湿下に/週間放置した
ままとし次(これをサンプル甲とする。)。もう7本は
第一図(B)に示した装置にセットし、ロータリーポン
プコθでやはり/週間真空列きをしつづけ気流にさらす
状態とした(これをサンプル乙とする。)。The vapor deposition was carried out while introducing an equal amount of 02 gas into the vapor deposition chamber 3 so that the degree of vacuum in the vapor deposition chamber 3 was 3.0×10' Torr. Under these same conditions, a roll-deposited product was obtained. Seven of these were left at room temperature and humidity for a week (these are Sample A). The other seven tubes were set in the apparatus shown in Figure 1 (B), kept in vacuum for a week using a rotary pump θ, and exposed to airflow (this is Sample B).
しかる後に、このコサンプルから各々7000m間隔で
ぶ本のサンプルをIO¥s×7t%の大きさで切りだし
た(甲/〜甲乙、乙7〜乙2と呼ぶ。After that, from this co-sample, samples of IO\s x 7t% were cut out at intervals of 7000 m (referred to as A/~A-Otsu and Otsu7-Otsu2).
番号の小のほど巻きの中側から切り出したサンプルを意
味する。)。以上72本のサンプルft00C9o4R
Hの雰囲気下に/週間放置し、その前後での総磁束量φ
mCMXZα)の変化率(fi値は俤)
この変化率−Δφm/φrnの数値は小さい程、耐候性
が優れていると判断できる。サンプル乙では乙/〜乙乙
の全てにわ之ってほぼ同程度の低い値を示しているのに
対し、サンプル甲では巻取蒸着品の最外部甲乙のみ低く
、巻きの中側では耐候特性不良であることがわかる。The lower the number, the more the sample is cut from the inside of the roll. ). Above 72 samples ft00C9o4R
The total amount of magnetic flux φ before and after leaving it in an atmosphere of H for a week
mCMXZα) (fi value is 俤) It can be judged that the smaller the value of this change rate -Δφm/φrn, the better the weather resistance is. Sample O shows almost the same low values for all of Otsu/~Otsu Otsu, whereas in Sample A, only the outermost A and B of the rolled vapor-deposited product are low, and the weather resistance is low in the middle of the roll. It turns out that it is defective.
以上のように本発明の手法によれば耐候性の改良された
金属薄膜型磁気記録媒体を簡便に、しかも均一なそれを
製造できるものである。As described above, according to the method of the present invention, it is possible to easily and uniformly produce a metal thin film type magnetic recording medium with improved weather resistance.
第1図は巻取蒸着装置を示す。第2図(A)は巻取蒸着
品の外観、および第2図(B)は気流発生のための装置
である。
/・・・・・・真空槽
乙・・・・・・送り出しローラー
ク・・・・・・冷却ドラム
//、12・・・・・・ガス等入口
/j・・・・・・巻取ローラ
/l・・・・・・中空巻芯
/I?・・・・・・気密シール
20・・・・・・真空ポンプ
特許出願人 富士写真フイルノ、株式会社第2図FIG. 1 shows a winding vapor deposition apparatus. FIG. 2(A) shows the external appearance of the rolled vapor-deposited product, and FIG. 2(B) shows the device for generating airflow. /...Vacuum tank B...Feeding roller...Cooling drum//, 12...Gas, etc. inlet/j...Take-up roller /l...Hollow core /I? ... Airtight seal 20 ... Vacuum pump patent applicant Fuji Photo Filno Co., Ltd. Figure 2
Claims (1)
を設けた巻取蒸着品を、該蒸着品が巻かれている間の空
隙に酸化性ガスを含む気流を生ぜしめる条件下で保存す
ることを特徴とする磁気記録媒体の製造方法。A rolled vapor-deposited product, in which a magnetic metal or alloy thin film is provided on a flexible substrate by a rolled-up vapor deposition method, is stored under conditions that generate an air flow containing oxidizing gas in the gap between the rolled vapor-deposited products. A method of manufacturing a magnetic recording medium, characterized in that:
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24987486A JPS63104220A (en) | 1986-10-21 | 1986-10-21 | Production of magnetic recording medium |
US07/110,820 US4885189A (en) | 1986-10-21 | 1987-10-21 | Method of producing magnetic recording media |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24987486A JPS63104220A (en) | 1986-10-21 | 1986-10-21 | Production of magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63104220A true JPS63104220A (en) | 1988-05-09 |
JPH0522292B2 JPH0522292B2 (en) | 1993-03-29 |
Family
ID=17199476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24987486A Granted JPS63104220A (en) | 1986-10-21 | 1986-10-21 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63104220A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH046627A (en) * | 1990-04-23 | 1992-01-10 | Matsushita Electric Ind Co Ltd | Highly function thin film and production thereof |
-
1986
- 1986-10-21 JP JP24987486A patent/JPS63104220A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH046627A (en) * | 1990-04-23 | 1992-01-10 | Matsushita Electric Ind Co Ltd | Highly function thin film and production thereof |
Also Published As
Publication number | Publication date |
---|---|
JPH0522292B2 (en) | 1993-03-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |