JPS63103925U - - Google Patents

Info

Publication number
JPS63103925U
JPS63103925U JP1986203971U JP20397186U JPS63103925U JP S63103925 U JPS63103925 U JP S63103925U JP 1986203971 U JP1986203971 U JP 1986203971U JP 20397186 U JP20397186 U JP 20397186U JP S63103925 U JPS63103925 U JP S63103925U
Authority
JP
Japan
Prior art keywords
guide surface
piezo element
fixed
horizontal plane
same horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986203971U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986203971U priority Critical patent/JPS63103925U/ja
Publication of JPS63103925U publication Critical patent/JPS63103925U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP1986203971U 1986-12-24 1986-12-24 Pending JPS63103925U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986203971U JPS63103925U (enExample) 1986-12-24 1986-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986203971U JPS63103925U (enExample) 1986-12-24 1986-12-24

Publications (1)

Publication Number Publication Date
JPS63103925U true JPS63103925U (enExample) 1988-07-06

Family

ID=31169800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986203971U Pending JPS63103925U (enExample) 1986-12-24 1986-12-24

Country Status (1)

Country Link
JP (1) JPS63103925U (enExample)

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