JPS6310371U - - Google Patents

Info

Publication number
JPS6310371U
JPS6310371U JP10377286U JP10377286U JPS6310371U JP S6310371 U JPS6310371 U JP S6310371U JP 10377286 U JP10377286 U JP 10377286U JP 10377286 U JP10377286 U JP 10377286U JP S6310371 U JPS6310371 U JP S6310371U
Authority
JP
Japan
Prior art keywords
working gas
low
temperature
cooler
supply source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10377286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10377286U priority Critical patent/JPS6310371U/ja
Publication of JPS6310371U publication Critical patent/JPS6310371U/ja
Pending legal-status Critical Current

Links

JP10377286U 1986-07-08 1986-07-08 Pending JPS6310371U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10377286U JPS6310371U (zh) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10377286U JPS6310371U (zh) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6310371U true JPS6310371U (zh) 1988-01-23

Family

ID=30976647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10377286U Pending JPS6310371U (zh) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6310371U (zh)

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