JPS6310289U - - Google Patents
Info
- Publication number
- JPS6310289U JPS6310289U JP10582586U JP10582586U JPS6310289U JP S6310289 U JPS6310289 U JP S6310289U JP 10582586 U JP10582586 U JP 10582586U JP 10582586 U JP10582586 U JP 10582586U JP S6310289 U JPS6310289 U JP S6310289U
- Authority
- JP
- Japan
- Prior art keywords
- turbo
- molecular pump
- window
- exhaust port
- transparent member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10582586U JPS6310289U ( ) | 1986-07-08 | 1986-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10582586U JPS6310289U ( ) | 1986-07-08 | 1986-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310289U true JPS6310289U ( ) | 1988-01-23 |
Family
ID=30980618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10582586U Pending JPS6310289U ( ) | 1986-07-08 | 1986-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310289U ( ) |
-
1986
- 1986-07-08 JP JP10582586U patent/JPS6310289U/ja active Pending