JPS63102766U - - Google Patents

Info

Publication number
JPS63102766U
JPS63102766U JP20409486U JP20409486U JPS63102766U JP S63102766 U JPS63102766 U JP S63102766U JP 20409486 U JP20409486 U JP 20409486U JP 20409486 U JP20409486 U JP 20409486U JP S63102766 U JPS63102766 U JP S63102766U
Authority
JP
Japan
Prior art keywords
boat
cooling
carbon
liquid phase
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20409486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20409486U priority Critical patent/JPS63102766U/ja
Publication of JPS63102766U publication Critical patent/JPS63102766U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP20409486U 1986-12-24 1986-12-24 Pending JPS63102766U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20409486U JPS63102766U (enrdf_load_stackoverflow) 1986-12-24 1986-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20409486U JPS63102766U (enrdf_load_stackoverflow) 1986-12-24 1986-12-24

Publications (1)

Publication Number Publication Date
JPS63102766U true JPS63102766U (enrdf_load_stackoverflow) 1988-07-04

Family

ID=31170032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20409486U Pending JPS63102766U (enrdf_load_stackoverflow) 1986-12-24 1986-12-24

Country Status (1)

Country Link
JP (1) JPS63102766U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003262A1 (ja) * 2002-06-28 2004-01-08 Sharp Kabushiki Kaisha 薄板製造方法および薄板製造装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003262A1 (ja) * 2002-06-28 2004-01-08 Sharp Kabushiki Kaisha 薄板製造方法および薄板製造装置
US7186578B2 (en) 2002-06-28 2007-03-06 Sharp Kabushiki Kaisha Thin sheet production method and thin sheet production device
CN1324657C (zh) * 2002-06-28 2007-07-04 夏普株式会社 薄板制造方法和薄板制造装置
US7485477B2 (en) 2002-06-28 2009-02-03 Sharp Kabushiki Kaisha Thin plate manufacturing method and thin plate manufacturing apparatus

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