JPS63102267U - - Google Patents
Info
- Publication number
- JPS63102267U JPS63102267U JP19704786U JP19704786U JPS63102267U JP S63102267 U JPS63102267 U JP S63102267U JP 19704786 U JP19704786 U JP 19704786U JP 19704786 U JP19704786 U JP 19704786U JP S63102267 U JPS63102267 U JP S63102267U
- Authority
- JP
- Japan
- Prior art keywords
- cold cathode
- nitrides
- coated
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- -1 transition metal nitride Chemical class 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197047U JPH0451498Y2 (ja�@�@) | 1986-12-22 | 1986-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197047U JPH0451498Y2 (ja�@�@) | 1986-12-22 | 1986-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63102267U true JPS63102267U (ja�@�@) | 1988-07-02 |
| JPH0451498Y2 JPH0451498Y2 (ja�@�@) | 1992-12-03 |
Family
ID=31156419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986197047U Expired JPH0451498Y2 (ja�@�@) | 1986-12-22 | 1986-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451498Y2 (ja�@�@) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062184A (ja) * | 1983-09-14 | 1985-04-10 | Nippon Koshuha Kk | 窒素レ−ザ装置 |
-
1986
- 1986-12-22 JP JP1986197047U patent/JPH0451498Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062184A (ja) * | 1983-09-14 | 1985-04-10 | Nippon Koshuha Kk | 窒素レ−ザ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451498Y2 (ja�@�@) | 1992-12-03 |