JPS63102267U - - Google Patents

Info

Publication number

JPS63102267U

JPS63102267U JP19704786U JP19704786U JPS63102267U JP S63102267 U JPS63102267 U JP S63102267U JP 19704786 U JP19704786 U JP 19704786U JP 19704786 U JP19704786 U JP 19704786U JP S63102267 U JPS63102267 U JP S63102267U

Authority

JP

Japan

Prior art keywords

cold cathode

nitrides

coated

utility

scope

Prior art date

1986-12-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 229910052735 hafnium Inorganic materials 0.000 claims 1
• 229910052758 niobium Inorganic materials 0.000 claims 1
• 150000004767 nitrides Chemical class 0.000 claims 1
• 229910052715 tantalum Inorganic materials 0.000 claims 1
• 229910052719 titanium Inorganic materials 0.000 claims 1
• 229910052720 vanadium Inorganic materials 0.000 claims 1
• 229910052726 zirconium Inorganic materials 0.000 claims 1
• 239000000758 substrate Substances 0.000 description 3
• 239000010406 cathode material Substances 0.000 description 2
• ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
• NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 229910052723 transition metal Inorganic materials 0.000 description 1
• -1 transition metal nitride Chemical class 0.000 description 1