JPS63102239U - - Google Patents
Info
- Publication number
- JPS63102239U JPS63102239U JP19780586U JP19780586U JPS63102239U JP S63102239 U JPS63102239 U JP S63102239U JP 19780586 U JP19780586 U JP 19780586U JP 19780586 U JP19780586 U JP 19780586U JP S63102239 U JPS63102239 U JP S63102239U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- hangar
- loading
- shelf
- hangar main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19780586U JPH0341471Y2 (https=) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19780586U JPH0341471Y2 (https=) | 1986-12-23 | 1986-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63102239U true JPS63102239U (https=) | 1988-07-02 |
| JPH0341471Y2 JPH0341471Y2 (https=) | 1991-08-30 |
Family
ID=31157905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19780586U Expired JPH0341471Y2 (https=) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341471Y2 (https=) |
-
1986
- 1986-12-23 JP JP19780586U patent/JPH0341471Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341471Y2 (https=) | 1991-08-30 |