JPS63102235U - - Google Patents

Info

Publication number

JPS63102235U

JPS63102235U JP19802486U JP19802486U JPS63102235U JP S63102235 U JPS63102235 U JP S63102235U JP 19802486 U JP19802486 U JP 19802486U JP 19802486 U JP19802486 U JP 19802486U JP S63102235 U JPS63102235 U JP S63102235U

Authority

JP

Japan

Prior art keywords

thermal transfer

response

semiconductor wafer

transfer head

defective signal

Prior art date

1986-12-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
• 229910052799 carbon Inorganic materials 0.000 claims description 4
• 230000002950 deficient Effects 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000004804 winding Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3