JPS63101865U - - Google Patents

Info

Publication number
JPS63101865U
JPS63101865U JP1986195868U JP19586886U JPS63101865U JP S63101865 U JPS63101865 U JP S63101865U JP 1986195868 U JP1986195868 U JP 1986195868U JP 19586886 U JP19586886 U JP 19586886U JP S63101865 U JPS63101865 U JP S63101865U
Authority
JP
Japan
Prior art keywords
temperature sensing
electrode
gas
rate sensor
sensing elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986195868U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452686Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986195868U priority Critical patent/JPH0452686Y2/ja
Publication of JPS63101865U publication Critical patent/JPS63101865U/ja
Application granted granted Critical
Publication of JPH0452686Y2 publication Critical patent/JPH0452686Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP1986195868U 1986-12-22 1986-12-22 Expired JPH0452686Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986195868U JPH0452686Y2 (https=) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986195868U JPH0452686Y2 (https=) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63101865U true JPS63101865U (https=) 1988-07-02
JPH0452686Y2 JPH0452686Y2 (https=) 1992-12-10

Family

ID=31154152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986195868U Expired JPH0452686Y2 (https=) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0452686Y2 (https=)

Also Published As

Publication number Publication date
JPH0452686Y2 (https=) 1992-12-10

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