JPS63101859U - - Google Patents

Info

Publication number

JPS63101859U

JPS63101859U JP20337486U JP20337486U JPS63101859U JP S63101859 U JPS63101859 U JP S63101859U JP 20337486 U JP20337486 U JP 20337486U JP 20337486 U JP20337486 U JP 20337486U JP S63101859 U JPS63101859 U JP S63101859U

Authority

JP

Japan

Prior art keywords

sensor body

sensor

gas

heat

metal oxide

Prior art date

1986-12-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910044991 metal oxide Inorganic materials 0.000 claims description 3
• 150000004706 metal oxides Chemical class 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 229920003002 synthetic resin Polymers 0.000 claims description 3
• 239000000057 synthetic resin Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000005855 radiation Effects 0.000 claims 1

Cited By (1)