JPS63101510U - - Google Patents
Info
- Publication number
- JPS63101510U JPS63101510U JP20399186U JP20399186U JPS63101510U JP S63101510 U JPS63101510 U JP S63101510U JP 20399186 U JP20399186 U JP 20399186U JP 20399186 U JP20399186 U JP 20399186U JP S63101510 U JPS63101510 U JP S63101510U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- bearing
- shaft
- circle
- passing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005096 rolling process Methods 0.000 claims 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は第１図に示すウエハーカツトローラーの一使
用例を示す側面図、第３図は従来の一例を示す斜
視図、第４図は第３図に示すウエハーカツトロー
ラーの一使用例を示す側面図である。
１……円柱、２……ベアリング、３……シヤフ
ト、４……弾性体、５……半導体ウエハー、６…
…粘着テープ。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a side view showing an example of use of the wafer cut roller shown in Fig. 1, Fig. 3 is a perspective view showing an example of a conventional example, and Fig. 4 is a side view showing an example of use of the wafer cut roller shown in Fig. 3. It is a diagram. 1... Cylinder, 2... Bearing, 3... Shaft, 4... Elastic body, 5... Semiconductor wafer, 6...
…Adhesive tape.
Claims (1)
両端に外輪が固定されたベアリング２と前記ベア
リング２の内輪を通るシヤフト３と前記円柱１の
外部に接合され、かつころがりの方向に対して垂
直に一定の間隔に溝がありかつ凸部先端がＲ形状
でありかつ前記円柱１より弾性係数の小さい弾性
体４とを含むことを特徴とするウエハーカツトロ
ーラー。 A cylinder 1 with a through hole in the center of the circle, a bearing 2 with an outer ring fixed to both ends of the cylinder 1, a shaft 3 passing through the inner ring of the bearing 2, and a shaft 3 connected to the outside of the cylinder 1 and with respect to the rolling direction. A wafer cut roller comprising an elastic body 4 having grooves vertically spaced at regular intervals, a convex tip having an R-shape, and having a smaller elastic modulus than the cylinder 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20399186U JPS63101510U (en) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20399186U JPS63101510U (en) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63101510U true JPS63101510U (en) | 1988-07-01 |
Family
ID=31169839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20399186U Pending JPS63101510U (en) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63101510U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926453A (en) * | 1972-07-05 | 1974-03-08 |
-
1986
- 1986-12-24 JP JP20399186U patent/JPS63101510U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926453A (en) * | 1972-07-05 | 1974-03-08 |