JPS63101452U - - Google Patents

Info

Publication number
JPS63101452U
JPS63101452U JP19688886U JP19688886U JPS63101452U JP S63101452 U JPS63101452 U JP S63101452U JP 19688886 U JP19688886 U JP 19688886U JP 19688886 U JP19688886 U JP 19688886U JP S63101452 U JPS63101452 U JP S63101452U
Authority
JP
Japan
Prior art keywords
reservoir
support rod
liquid metal
metal ion
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19688886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345414Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19688886U priority Critical patent/JPH0345414Y2/ja
Publication of JPS63101452U publication Critical patent/JPS63101452U/ja
Application granted granted Critical
Publication of JPH0345414Y2 publication Critical patent/JPH0345414Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP19688886U 1986-12-22 1986-12-22 Expired JPH0345414Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19688886U JPH0345414Y2 (en:Method) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19688886U JPH0345414Y2 (en:Method) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63101452U true JPS63101452U (en:Method) 1988-07-01
JPH0345414Y2 JPH0345414Y2 (en:Method) 1991-09-25

Family

ID=31156105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19688886U Expired JPH0345414Y2 (en:Method) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0345414Y2 (en:Method)

Also Published As

Publication number Publication date
JPH0345414Y2 (en:Method) 1991-09-25

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