JPS63101396U - - Google Patents

Info

Publication number
JPS63101396U
JPS63101396U JP19580386U JP19580386U JPS63101396U JP S63101396 U JPS63101396 U JP S63101396U JP 19580386 U JP19580386 U JP 19580386U JP 19580386 U JP19580386 U JP 19580386U JP S63101396 U JPS63101396 U JP S63101396U
Authority
JP
Japan
Prior art keywords
sealing material
gas holder
side plate
piston
flat capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19580386U
Other languages
English (en)
Other versions
JPH0451279Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19580386U priority Critical patent/JPH0451279Y2/ja
Publication of JPS63101396U publication Critical patent/JPS63101396U/ja
Application granted granted Critical
Publication of JPH0451279Y2 publication Critical patent/JPH0451279Y2/ja
Expired legal-status Critical Current

Links

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Description

【図面の簡単な説明】
第1図は本考案に係るガスホルダにおけるシー
ル材磨粍量検出装置の一実施例を示す縦断面図、
第2図は本考案の装置を具えたガスホルダの概要
を示す縦断面図、第3図は従来のガスホルダのシ
ール部の縦断面図である。 1……ガスホルダ側板、2……ピストン、4…
…シール材、5……シール材スペーサ、11……
平板コンデンサ、12……防爆静電容量検出アン
プ。

Claims (1)

    【実用新案登録請求の範囲】
  1. ガスホルダ側板内を上下動するピストンの外周
    に、前記側板内周面に沿つて摺動し、同側板と前
    記ピストンとの間の気密を保持するシール材を具
    えたシール装置を有するガスホルダにおいて、前
    記シール材を挾持するシール材スペーサ内に平板
    コンデンサを埋設し、同平板コンデンサを防爆静
    電容量検出アンプに接続してなることを特徴とす
    るガスホルダにおけるシール材磨粍量検出装置。
JP19580386U 1986-12-22 1986-12-22 Expired JPH0451279Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19580386U JPH0451279Y2 (ja) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19580386U JPH0451279Y2 (ja) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63101396U true JPS63101396U (ja) 1988-07-01
JPH0451279Y2 JPH0451279Y2 (ja) 1992-12-02

Family

ID=31154029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19580386U Expired JPH0451279Y2 (ja) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0451279Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006077880A (ja) * 2004-09-09 2006-03-23 Riken Keiki Co Ltd ガスホルダ用ガス検知装置
JP2012097318A (ja) * 2010-11-01 2012-05-24 Fuji Electronics Industry Co Ltd 高周波加熱装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006077880A (ja) * 2004-09-09 2006-03-23 Riken Keiki Co Ltd ガスホルダ用ガス検知装置
JP2012097318A (ja) * 2010-11-01 2012-05-24 Fuji Electronics Industry Co Ltd 高周波加熱装置

Also Published As

Publication number Publication date
JPH0451279Y2 (ja) 1992-12-02

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